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Agilent Varian Exhaust Foreline Baffle for AX-65 Diffusion Pump, L9676301
Item#: PN22556 Mfr Part#: L9676301 Manufacturer: Agilent Technologies / Varian
Main image
Condition: New
New Agilent Varian Exhaust Foreline Baffle for AX-65 Diffusion Pump, L9676301
Features:
  • P/N L9676301
  • OEM Spare Part
  • Number 9 on exploded view image.
  • for AX-65 Pump
Price upon request
Item#: PN22556 Mfr Part#: L9676301
Request a repair estimate Like it Financing available
Agilent Varian Exhaust Foreline Baffle for AX-65 Diffusion Pump, L9676301
Item#: PN22556 Mfr Part#: L9676301 Manufacturer: Agilent Technologies / Varian

Agilent Varian Exhaust Foreline Baffle for AX-65 Diffusion Pump, L9676301

For location of this Exhaust Forline Baffle please reffer to item labeled with Number 9 on exploded view image.

This is a Agilent AX65 OEM spare parts for AX-65 pump.

This Agilent optional pump ready Thermal switch is designed to be attached to the side of Agilent AX-65 pump.

 

Agilent Varian AX 65 pump comes with Fully optimized Jet, Agilent produces vapor jets that deliver the highest throughput, highest pressure stability, and tolerable forline pressure available, while reducing ackstreaming to a absolute minimum.

 

 

AX 65 Diffusion Pump Pumping Speed:

 

  • Air: 65 l/s

  • He: 90 l/s

Operating Range

  • Torr    3x10−3 to <5x10−8

  • Mbar  3.9x10−3 to <6.5x10−8

Throughput (Air), Max. Optimum Range

  • Torr-l/s     0.19

  • Mbar-l/s   0.25

Forepressure, Max. No Load

  • Torr    0.75

  • mbar  1.00

Forepressure, Max. Full Load

  • Torr    0.60

  • mbar  0.78

Backstreaming Rate at Pump Inlet

  • mg/cm2/min <2x10-4

Recommended Backing Pump: > 2.5 m3/hr or 1.5 CFM

Warmup Time: 10 Minutes

Cooldown Time: 10 Minutes (with quick cool coil)

Fluid Charge: 30 cc, Santovac 5 oil is recomended for this Pump

Electrical Requirements: 115 VAC Single Phase, 50/60 Hz

Pump Power: 250 Watts

 

1. Agilent Varian Jet assembly with top hat and shield for AX-65 Diffusion Pump, L9674301 - PN22534

2. Agilent Varian Cold Cap for AX-65 Diffusion Pump, L9675301 - PN22536

3. Agilent Inlet Baffle AX-65 Diffusion Pump, L9706001, Varian Inlet Baffle - PN22537

4. Agilent Jet Alignment Kit AX-65 Diffusion Pump, L9995301, Varian Jet Alignment Kit - PN22538

5. Agilent Heater Harness 90 VAC, 250 Watt for AX-65 Diffusion Pump, L9994301, Varian Heater Harness for Santovac 5 Oil - PN22539

5. Agilent Heater Harness 115 VAC, 250 Watt for AX-65 Diffusion Pump, L9994303, Varian Heater Harness for Santovac 5 Oil - PN22540

5. Agilent Heater Harness 165 VAC, 250 Watt for AX-65 Diffusion Pump, L9994302, Varian Heater Harness for Santovac 5 Oil - PN22549

5. Agilent Heater Harness 220 VAC, 250 Watt for AX-65 Diffusion Pump, L9994304, Varian Heater Harness for Santovac 5 Oil - PN22550

5. Agilent Heater Harness 115 VAC, 200 Watt for AX-65 Diffusion Pump, L9994307, Varian Heater Harness for CMP 704 Oil - PN22551

5. Agilent Heater Harness 220 VAC, 200 Watt for AX-65 Diffusion Pump, L9994308, Varian Heater Harness for CMP 704 Oil - PN22552

6. Agilent Over Temperature Thermal Switch, Normally Closed for AX-65 Diffusion Pump Heater Harness (Set to open at 365 °F), Varian L9964001 - PN22553

7. Agilent Optional Thermal Switch, Normally Open Pump Ready Switch for AX-65 Diffusion Pump Heater Harness (Set to close at 170 °F), Varian L9964002 - PN22554

8. Agilent Varian Fan, Universal Voltage for AX-65 Diffusion Pump, 115-230 VAC, Fan Only 661300138 - PN22555

12. Agilent Varian Bottom Insulation for AX-65 Diffusion Pump, (1 required with heater harness), L9701002 - PN22557

 

A&J Vacuum also repair / rebuild and service all Agilent Varian AX-65 and VHS Diffusion  Vacuum Pumps along with all other Agilent and Varian Turbo Pumps, Varial Scroll Pumps, Agilent scroll Pumps and all other Agilent Vacuum Rotary Vane pumps. Please contact us for information on service program or click here http://www.ajvs.com/service.php to go to our Service page. We also offer Emergency service upon request. For more information Please contact A&J Vacuum Services at 973-249-0854.

This item is non-returnable/non-refundable

Agilent Varian Exhaust Foreline Baffle for AX-65 Diffusion Pump, L9676301

For location of this Exhaust Forline Baffle please reffer to item labeled with Number 9 on exploded view image.

This is a Agilent OEM spare parts for AX-65 pump.

This Agilent optional pump ready Thermal switch is designed to be attached to the side of Agilent AX-65 pump.

 

Diffusion Pump Pumping Speed:

  • Air: 65 l/s

  • He: 90 l/s

Operating Range

  • Torr    3x10−3 to <5x10−8

  • Mbar  3.9x10−3 to <6.5x10−8

Throughput (Air), Max. Optimum Range

  • Torr-l/s     0.19

  • Mbar-l/s   0.25

Forepressure, Max. No Load

  • Torr    0.75

  • mbar  1.00

Forepressure, Max. Full Load

  • Torr    0.60

  • mbar  0.78

Backstreaming Rate at Pump Inlet

  • mg/cm2/min <2x10-4

Recommended Backing Pump: > 2.5 m3/hr or 1.5 CFM

Warmup Time: 10 Minutes

Cooldown Time: 10 Minutes (with quick cool coil)

Fluid Charge: 30 cc

Electrical Requirements: 115 VAC Single Phase, 50/60 Hz

Pump Power: 250 Watts

Mounted cooling fan included with each pump (P/N 661300138)

Overtemperature thermal switch set to open at 365°F(182 °C)

Use 250W heater with polyphenyl ether fluids (such as DC-705 and Santovac 5).

Use 200W heater for other fluids.

 

1. Agilent Varian Jet assembly with top hat and shield for AX-65 Diffusion Pump, L9674301 - PN22534

2. Agilent Varian Cold Cap for AX-65 Diffusion Pump, L9675301 - PN22536

3. Agilent Inlet Baffle AX-65 Diffusion Pump, L9706001, Varian Inlet Baffle - PN22537

4. Agilent Jet Alignment Kit AX-65 Diffusion Pump, L9995301, Varian Jet Alignment Kit - PN22538

5. Agilent Heater Harness 90 VAC, 250 Watt for AX-65 Diffusion Pump, L9994301, Varian Heater Harness for Santovac 5 Oil - PN22539

5. Agilent Heater Harness 115 VAC, 250 Watt for AX-65 Diffusion Pump, L9994303, Varian Heater Harness for Santovac 5 Oil - PN22540

5. Agilent Heater Harness 165 VAC, 250 Watt for AX-65 Diffusion Pump, L9994302, Varian Heater Harness for Santovac 5 Oil - PN22549

5. Agilent Heater Harness 220 VAC, 250 Watt for AX-65 Diffusion Pump, L9994304, Varian Heater Harness for Santovac 5 Oil - PN22550

5. Agilent Heater Harness 115 VAC, 200 Watt for AX-65 Diffusion Pump, L9994307, Varian Heater Harness for CMP 704 Oil - PN22551

5. Agilent Heater Harness 220 VAC, 200 Watt for AX-65 Diffusion Pump, L9994308, Varian Heater Harness for CMP 704 Oil - PN22552

6. Agilent Over Temperature Thermal Switch, Normally Closed for AX-65 Diffusion Pump Heater Harness (Set to open at 365 °F), Varian L9964001 - PN22553

7. Agilent Optional Thermal Switch, Normally Open Pump Ready Switch for AX-65 Diffusion Pump Heater Harness (Set to close at 170 °F), Varian L9964002 - PN22554

8. Agilent Varian Fan, Universal Voltage for AX-65 Diffusion Pump, 115-230 VAC, Fan Only 661300138 - PN22555

​12. Agilent Varian Bottom Insulation for AX-65 Diffusion Pump, (1 required with heater harness), L9701002 - PN22557

 

A&J Vacuum also repair / rebuild and service all Agilent Varian AX-65 and VHS Diffusion  Vacuum Pumps along with all other Agilent and Varian Turbo Pumps, Varial Scroll Pumps, Agilent scroll Pumps and all other Agilent Vacuum Rotary Vane pumps. Please contact us for information on service program or click here http://www.ajvs.com/service.php to go to our Service page. We also offer Emergency service upon request. For more information Please contact A&J Vacuum Services at 973-249-0854.

| Service and Repair
We can repair your:
  • Turbo Pumps
  • Rotary Vane Pumps
  • Dry Vacuum Pumps
  • Leak Detectors
  • Scroll Dry Pumps
  • Vacuum Boosters
  • Diaphragm Dry Pumps
You trusted worldwide leader of High Vacuum equipment!
Generate service rma Request a repair estimate
Call us for your free repair estimate!
973-249-0854

A & J Vacuum Services provides repair service for all types of High Vacuum equipment. We perform Turbomolecular Pump repair, Turbo Pump Repair, Dry Pump repair, Vacuum Pump repair, Mass Spectrometer repair, Rotary Vane Pump repair, Vacuum Booster repair, and Leak detector repair. Our highly trained technicians have years of experience and guarantee the highest quality service.

We operate at our own full service repair facility in Clifton, NJ. We have invested in state-of-the-art equipment including; complete line of decontamination, cleaning, drying, balancing, vibration analysis and software to minimize failures. Our in-house machine shop is capable of machining various components, prototypes and housing conversions as needed.

We support all major manufacturers including Pfeiffer Vacuum, Alcatel / Adixen, Edwards Vacuum, Varian, Oerlikon / Leybod Vacuum, Vacuubrand, and Agilent Technologies.

Repair Steps

  1. Full incoming inspection and run up time check, vibration check, drive inspection.
  2. Full disassembly, decontamination and cleaning.
  3. Pump is balanced utilizing state-of-the-art equipment from the world leader in equipment balancing and analysis to reduce noise and vibrations and extend bearings life.
  4. Assembly and replacement of all necessary parts such as shafts, bushings, bearings, sleeves, O-rings, gaskets, seals, wicks, etc. Only parts that meet or surpass OEM specifications are used to ensure dependable highest quality service and long pump life.
  5. Final test and leak check. The pump in fully assembled condition is checked for vacuum seal. Leak test to 1 x 10-9 Mbar l/s. Vibrations are analyzed and test data is digitally recorded.

Every pump and instrument is extensively tested for 48 hours. During our final tests, we monitor total pressure, temperature, vibration and noise level utilizing newest testing technologies and techniques specified by OEM. Upon request, we can provide our customers with a pump down graph. Call us for your free repair estimate at 1-973-249-0854.

Overview

Agilent Varian Exhaust Foreline Baffle for AX-65 Diffusion Pump, L9676301
Item#: PN22556 Mfr Part#: L9676301 Manufacturer: Agilent Technologies / Varian

Agilent Varian Exhaust Foreline Baffle for AX-65 Diffusion Pump, L9676301

For location of this Exhaust Forline Baffle please reffer to item labeled with Number 9 on exploded view image.

This is a Agilent AX65 OEM spare parts for AX-65 pump.

This Agilent optional pump ready Thermal switch is designed to be attached to the side of Agilent AX-65 pump.

 

Agilent Varian AX 65 pump comes with Fully optimized Jet, Agilent produces vapor jets that deliver the highest throughput, highest pressure stability, and tolerable forline pressure available, while reducing ackstreaming to a absolute minimum.

 

 

AX 65 Diffusion Pump Pumping Speed:

 

  • Air: 65 l/s

  • He: 90 l/s

Operating Range

  • Torr    3x10−3 to <5x10−8

  • Mbar  3.9x10−3 to <6.5x10−8

Throughput (Air), Max. Optimum Range

  • Torr-l/s     0.19

  • Mbar-l/s   0.25

Forepressure, Max. No Load

  • Torr    0.75

  • mbar  1.00

Forepressure, Max. Full Load

  • Torr    0.60

  • mbar  0.78

Backstreaming Rate at Pump Inlet

  • mg/cm2/min <2x10-4

Recommended Backing Pump: > 2.5 m3/hr or 1.5 CFM

Warmup Time: 10 Minutes

Cooldown Time: 10 Minutes (with quick cool coil)

Fluid Charge: 30 cc, Santovac 5 oil is recomended for this Pump

Electrical Requirements: 115 VAC Single Phase, 50/60 Hz

Pump Power: 250 Watts

 

1. Agilent Varian Jet assembly with top hat and shield for AX-65 Diffusion Pump, L9674301 - PN22534

2. Agilent Varian Cold Cap for AX-65 Diffusion Pump, L9675301 - PN22536

3. Agilent Inlet Baffle AX-65 Diffusion Pump, L9706001, Varian Inlet Baffle - PN22537

4. Agilent Jet Alignment Kit AX-65 Diffusion Pump, L9995301, Varian Jet Alignment Kit - PN22538

5. Agilent Heater Harness 90 VAC, 250 Watt for AX-65 Diffusion Pump, L9994301, Varian Heater Harness for Santovac 5 Oil - PN22539

5. Agilent Heater Harness 115 VAC, 250 Watt for AX-65 Diffusion Pump, L9994303, Varian Heater Harness for Santovac 5 Oil - PN22540

5. Agilent Heater Harness 165 VAC, 250 Watt for AX-65 Diffusion Pump, L9994302, Varian Heater Harness for Santovac 5 Oil - PN22549

5. Agilent Heater Harness 220 VAC, 250 Watt for AX-65 Diffusion Pump, L9994304, Varian Heater Harness for Santovac 5 Oil - PN22550

5. Agilent Heater Harness 115 VAC, 200 Watt for AX-65 Diffusion Pump, L9994307, Varian Heater Harness for CMP 704 Oil - PN22551

5. Agilent Heater Harness 220 VAC, 200 Watt for AX-65 Diffusion Pump, L9994308, Varian Heater Harness for CMP 704 Oil - PN22552

6. Agilent Over Temperature Thermal Switch, Normally Closed for AX-65 Diffusion Pump Heater Harness (Set to open at 365 °F), Varian L9964001 - PN22553

7. Agilent Optional Thermal Switch, Normally Open Pump Ready Switch for AX-65 Diffusion Pump Heater Harness (Set to close at 170 °F), Varian L9964002 - PN22554

8. Agilent Varian Fan, Universal Voltage for AX-65 Diffusion Pump, 115-230 VAC, Fan Only 661300138 - PN22555

12. Agilent Varian Bottom Insulation for AX-65 Diffusion Pump, (1 required with heater harness), L9701002 - PN22557

 

A&J Vacuum also repair / rebuild and service all Agilent Varian AX-65 and VHS Diffusion  Vacuum Pumps along with all other Agilent and Varian Turbo Pumps, Varial Scroll Pumps, Agilent scroll Pumps and all other Agilent Vacuum Rotary Vane pumps. Please contact us for information on service program or click here http://www.ajvs.com/service.php to go to our Service page. We also offer Emergency service upon request. For more information Please contact A&J Vacuum Services at 973-249-0854.

Agilent Varian Exhaust Foreline Baffle for AX-65 Diffusion Pump, L9676301

For location of this Exhaust Forline Baffle please reffer to item labeled with Number 9 on exploded view image.

This is a Agilent OEM spare parts for AX-65 pump.

This Agilent optional pump ready Thermal switch is designed to be attached to the side of Agilent AX-65 pump.

 

Diffusion Pump Pumping Speed:

  • Air: 65 l/s

  • He: 90 l/s

Operating Range

  • Torr    3x10−3 to <5x10−8

  • Mbar  3.9x10−3 to <6.5x10−8

Throughput (Air), Max. Optimum Range

  • Torr-l/s     0.19

  • Mbar-l/s   0.25

Forepressure, Max. No Load

  • Torr    0.75

  • mbar  1.00

Forepressure, Max. Full Load

  • Torr    0.60

  • mbar  0.78

Backstreaming Rate at Pump Inlet

  • mg/cm2/min <2x10-4

Recommended Backing Pump: > 2.5 m3/hr or 1.5 CFM

Warmup Time: 10 Minutes

Cooldown Time: 10 Minutes (with quick cool coil)

Fluid Charge: 30 cc

Electrical Requirements: 115 VAC Single Phase, 50/60 Hz

Pump Power: 250 Watts

Mounted cooling fan included with each pump (P/N 661300138)

Overtemperature thermal switch set to open at 365°F(182 °C)

Use 250W heater with polyphenyl ether fluids (such as DC-705 and Santovac 5).

Use 200W heater for other fluids.

 

1. Agilent Varian Jet assembly with top hat and shield for AX-65 Diffusion Pump, L9674301 - PN22534

2. Agilent Varian Cold Cap for AX-65 Diffusion Pump, L9675301 - PN22536

3. Agilent Inlet Baffle AX-65 Diffusion Pump, L9706001, Varian Inlet Baffle - PN22537

4. Agilent Jet Alignment Kit AX-65 Diffusion Pump, L9995301, Varian Jet Alignment Kit - PN22538

5. Agilent Heater Harness 90 VAC, 250 Watt for AX-65 Diffusion Pump, L9994301, Varian Heater Harness for Santovac 5 Oil - PN22539

5. Agilent Heater Harness 115 VAC, 250 Watt for AX-65 Diffusion Pump, L9994303, Varian Heater Harness for Santovac 5 Oil - PN22540

5. Agilent Heater Harness 165 VAC, 250 Watt for AX-65 Diffusion Pump, L9994302, Varian Heater Harness for Santovac 5 Oil - PN22549

5. Agilent Heater Harness 220 VAC, 250 Watt for AX-65 Diffusion Pump, L9994304, Varian Heater Harness for Santovac 5 Oil - PN22550

5. Agilent Heater Harness 115 VAC, 200 Watt for AX-65 Diffusion Pump, L9994307, Varian Heater Harness for CMP 704 Oil - PN22551

5. Agilent Heater Harness 220 VAC, 200 Watt for AX-65 Diffusion Pump, L9994308, Varian Heater Harness for CMP 704 Oil - PN22552

6. Agilent Over Temperature Thermal Switch, Normally Closed for AX-65 Diffusion Pump Heater Harness (Set to open at 365 °F), Varian L9964001 - PN22553

7. Agilent Optional Thermal Switch, Normally Open Pump Ready Switch for AX-65 Diffusion Pump Heater Harness (Set to close at 170 °F), Varian L9964002 - PN22554

8. Agilent Varian Fan, Universal Voltage for AX-65 Diffusion Pump, 115-230 VAC, Fan Only 661300138 - PN22555

​12. Agilent Varian Bottom Insulation for AX-65 Diffusion Pump, (1 required with heater harness), L9701002 - PN22557

 

A&J Vacuum also repair / rebuild and service all Agilent Varian AX-65 and VHS Diffusion  Vacuum Pumps along with all other Agilent and Varian Turbo Pumps, Varial Scroll Pumps, Agilent scroll Pumps and all other Agilent Vacuum Rotary Vane pumps. Please contact us for information on service program or click here http://www.ajvs.com/service.php to go to our Service page. We also offer Emergency service upon request. For more information Please contact A&J Vacuum Services at 973-249-0854.

We can repair your:
  • Turbo Pumps
  • Rotary Vane Pumps
  • Dry Vacuum Pumps
  • Leak Detectors
  • Scroll Dry Pumps
  • Vacuum Boosters
  • Diaphragm Dry Pumps
You trusted worldwide leader of High Vacuum equipment!
Generate service rma
Request a repair estimate
Call us for your free repair estimate!
973-249-0854

A & J Vacuum Services provides repair service for all types of High Vacuum equipment. We perform Turbomolecular Pump repair, Turbo Pump Repair, Dry Pump repair, Vacuum Pump repair, Mass Spectrometer repair, Rotary Vane Pump repair, Vacuum Booster repair, and Leak detector repair. Our highly trained technicians have years of experience and guarantee the highest quality service.

We operate at our own full service repair facility in Clifton, NJ. We have invested in state-of-the-art equipment including; complete line of decontamination, cleaning, drying, balancing, vibration analysis and software to minimize failures. Our in-house machine shop is capable of machining various components, prototypes and housing conversions as needed.

We support all major manufacturers including Pfeiffer Vacuum, Alcatel / Adixen, Edwards Vacuum, Varian, Oerlikon / Leybod Vacuum, Vacuubrand, and Agilent Technologies.

Repair Steps

  1. Full incoming inspection and run up time check, vibration check, drive inspection.
  2. Full disassembly, decontamination and cleaning.
  3. Pump is balanced utilizing state-of-the-art equipment from the world leader in equipment balancing and analysis to reduce noise and vibrations and extend bearings life.
  4. Assembly and replacement of all necessary parts such as shafts, bushings, bearings, sleeves, O-rings, gaskets, seals, wicks, etc. Only parts that meet or surpass OEM specifications are used to ensure dependable highest quality service and long pump life.
  5. Final test and leak check. The pump in fully assembled condition is checked for vacuum seal. Leak test to 1 x 10-9 Mbar l/s. Vibrations are analyzed and test data is digitally recorded.

Every pump and instrument is extensively tested for 48 hours. During our final tests, we monitor total pressure, temperature, vibration and noise level utilizing newest testing technologies and techniques specified by OEM. Upon request, we can provide our customers with a pump down graph. Call us for your free repair estimate at 1-973-249-0854.

Recommended:
Contact
address
A&J Vacuum Services
16 Somerset Place, Clifton, NJ 07012
customer service
Customer Service
Phone: 973-249-0854, Fax: 973-249-0855
working hours
Service Hours
8:00am to 5:00pm, Monday thru Friday EST
@ A&J Vacuum Services, Inc. 2000-2024. All Rights Reserved.
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