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Edwards iH80 Dry Vacuum Pump, 200-208 V, 50/60 Hz, A59000945
Edwards iH80 Overview:
Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership.
The iH Series offers high reliability for difficult processes, such as PECVD and LPCVD, where particulate, condensable and corrosive by-products are present.
The iH system operates at pressures between atmospheric and ultimate vacuum with no lubricating or sealing fluid in the pumping chamber. This ensures a clean pumping system without back-migration of oil into the system being evacuated.
The iH80 system has an HCDP80 dry pump; The HCDP pump has enclosed, water-cooled motors. The iH system is therefore suitable for applications in clean environments where fan cooling of motors is unacceptable.
The iH system has a gas system which introduces purge gas into the HCDP pump. This gas system is suitable for use on harsh duty processes. If you use the iH system on light or medium duty processes, you can use the economiser gas mode to reduce the consumption of purge nitrogen by the pumping system.
You can manually control the iH system through the Pump Display Terminal. Alternatively, you can use your process tool or other control equipment to control the operation of the iH system through an Interface Module or through an iM Communications Module accessory or you can use the iH Single Equipment Monitor accessory to control the operation of the iH system.
Edwards iH80 Applications:
- Load Lock
- Transfer
- Metrology
- Lithography
- PVD Process
- PVD Pre-clean
- RTA
- Strip/Ashing
- Etching
- Implant Source
- HDP CVD
- RTP
- SACVD
- MCVD
- PECVD
- LPCVD
- ALD
Click Here for Edwards iH 80 Manual
A&J Vacuum Services offers full repair/service of Edwards Vacuum Pumps, along with all other brands offered on our website. AJVS also services Edwards turbo pumps and rotary vane pumps. Please contact us for information about our service and repair program or click http://www.ajvs.com/service.php to access our services page. We also offer emergency service upon request. For more information, please email A&J Vacuum Services at info@ajvs.com or call (973) 249-0854. Thank you for choosing AJVS as your supplier.
Edwards iH80 Dry Vacuum Pump, 200-208 V, 50/60 Hz, A59000945
Edwards iH80 Technical Data:
| Pumping Speed: | 51 cfm |
| Ultimate Vacuum: | 3 x 10-2 mbar |
| Inlet Connection: | ISO 63 |
| Outlet Connection: | NW 40 |
| Power Input: | 2.4 kW |
| Rated Motor Power: | 2.9 kW |
| Oil Capacity: | 0.7 l |
|
Weight: |
240 kg / 530 lbs |
Click Here for Edwards iH 80 Manual
A&J Vacuum Services offers full repair/service of edwards Vacuum Pumps, along with all other brands offered on our website. AJVS also services Edwards turbo pumps and rotary vane pumps. Please contact us for information about our service and repair program or click http://www.ajvs.com/service.php to access our services page. We also offer emergency service upon request. For more information, please email A&J Vacuum Services at info@ajvs.com or call (973) 249-0854. Thank you for choosing AJVS as your supplier.
Edwards_iH_80_160_600_1000_1800_Dry_Pump_Manual.pdf 
|
Service and Repair - Turbo Pumps
- Rotary Vane Pumps
- Dry Vacuum Pumps
- Leak Detectors
- Scroll Dry Pumps
- Vacuum Boosters
- Diaphragm Dry Pumps
A & J Vacuum Services provides repair service for all types of High Vacuum equipment. We perform Turbomolecular Pump repair, Turbo Pump Repair, Dry Pump repair, Vacuum Pump repair, Mass Spectrometer repair, Rotary Vane Pump repair, Vacuum Booster repair, and Leak detector repair. Our highly trained technicians have years of experience and guarantee the highest quality service.
We operate at our own full service repair facility in Clifton, NJ. We have invested in state-of-the-art equipment including; complete line of decontamination, cleaning, drying, balancing, vibration analysis and software to minimize failures. Our in-house machine shop is capable of machining various components, prototypes and housing conversions as needed.
We support all major manufacturers including Pfeiffer Vacuum, Alcatel / Adixen, Edwards Vacuum, Varian, Oerlikon / Leybod Vacuum, Vacuubrand, and Agilent Technologies.
Repair Steps
- Full incoming inspection and run up time check, vibration check, drive inspection.
- Full disassembly, decontamination and cleaning.
- Pump is balanced utilizing state-of-the-art equipment from the world leader in equipment balancing and analysis to reduce noise and vibrations and extend bearings life.
- Assembly and replacement of all necessary parts such as shafts, bushings, bearings, sleeves, O-rings, gaskets, seals, wicks, etc. Only parts that meet or surpass OEM specifications are used to ensure dependable highest quality service and long pump life.
- Final test and leak check. The pump in fully assembled condition is checked for vacuum seal. Leak test to 1 x 10-9 Mbar l/s. Vibrations are analyzed and test data is digitally recorded.
Every pump and instrument is extensively tested for 48 hours. During our final tests, we monitor total pressure, temperature, vibration and noise level utilizing newest testing technologies and techniques specified by OEM. Upon request, we can provide our customers with a pump down graph. Call us for your free repair estimate at 1-973-249-0854.
Overview
Edwards iH80 Dry Vacuum Pump, 200-208 V, 50/60 Hz, A59000945
Edwards iH80 Overview:
Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership.
The iH Series offers high reliability for difficult processes, such as PECVD and LPCVD, where particulate, condensable and corrosive by-products are present.
The iH system operates at pressures between atmospheric and ultimate vacuum with no lubricating or sealing fluid in the pumping chamber. This ensures a clean pumping system without back-migration of oil into the system being evacuated.
The iH80 system has an HCDP80 dry pump; The HCDP pump has enclosed, water-cooled motors. The iH system is therefore suitable for applications in clean environments where fan cooling of motors is unacceptable.
The iH system has a gas system which introduces purge gas into the HCDP pump. This gas system is suitable for use on harsh duty processes. If you use the iH system on light or medium duty processes, you can use the economiser gas mode to reduce the consumption of purge nitrogen by the pumping system.
You can manually control the iH system through the Pump Display Terminal. Alternatively, you can use your process tool or other control equipment to control the operation of the iH system through an Interface Module or through an iM Communications Module accessory or you can use the iH Single Equipment Monitor accessory to control the operation of the iH system.
Edwards iH80 Applications:
- Load Lock
- Transfer
- Metrology
- Lithography
- PVD Process
- PVD Pre-clean
- RTA
- Strip/Ashing
- Etching
- Implant Source
- HDP CVD
- RTP
- SACVD
- MCVD
- PECVD
- LPCVD
- ALD
Click Here for Edwards iH 80 Manual
A&J Vacuum Services offers full repair/service of Edwards Vacuum Pumps, along with all other brands offered on our website. AJVS also services Edwards turbo pumps and rotary vane pumps. Please contact us for information about our service and repair program or click http://www.ajvs.com/service.php to access our services page. We also offer emergency service upon request. For more information, please email A&J Vacuum Services at info@ajvs.com or call (973) 249-0854. Thank you for choosing AJVS as your supplier.
Specifications
Edwards iH80 Dry Vacuum Pump, 200-208 V, 50/60 Hz, A59000945
Edwards iH80 Technical Data:
| Pumping Speed: | 51 cfm |
| Ultimate Vacuum: | 3 x 10-2 mbar |
| Inlet Connection: | ISO 63 |
| Outlet Connection: | NW 40 |
| Power Input: | 2.4 kW |
| Rated Motor Power: | 2.9 kW |
| Oil Capacity: | 0.7 l |
|
Weight: |
240 kg / 530 lbs |
Click Here for Edwards iH 80 Manual
A&J Vacuum Services offers full repair/service of edwards Vacuum Pumps, along with all other brands offered on our website. AJVS also services Edwards turbo pumps and rotary vane pumps. Please contact us for information about our service and repair program or click http://www.ajvs.com/service.php to access our services page. We also offer emergency service upon request. For more information, please email A&J Vacuum Services at info@ajvs.com or call (973) 249-0854. Thank you for choosing AJVS as your supplier.
Service & Repair
- Turbo Pumps
- Rotary Vane Pumps
- Dry Vacuum Pumps
- Leak Detectors
- Scroll Dry Pumps
- Vacuum Boosters
- Diaphragm Dry Pumps
A & J Vacuum Services provides repair service for all types of High Vacuum equipment. We perform Turbomolecular Pump repair, Turbo Pump Repair, Dry Pump repair, Vacuum Pump repair, Mass Spectrometer repair, Rotary Vane Pump repair, Vacuum Booster repair, and Leak detector repair. Our highly trained technicians have years of experience and guarantee the highest quality service.
We operate at our own full service repair facility in Clifton, NJ. We have invested in state-of-the-art equipment including; complete line of decontamination, cleaning, drying, balancing, vibration analysis and software to minimize failures. Our in-house machine shop is capable of machining various components, prototypes and housing conversions as needed.
We support all major manufacturers including Pfeiffer Vacuum, Alcatel / Adixen, Edwards Vacuum, Varian, Oerlikon / Leybod Vacuum, Vacuubrand, and Agilent Technologies.
Repair Steps
- Full incoming inspection and run up time check, vibration check, drive inspection.
- Full disassembly, decontamination and cleaning.
- Pump is balanced utilizing state-of-the-art equipment from the world leader in equipment balancing and analysis to reduce noise and vibrations and extend bearings life.
- Assembly and replacement of all necessary parts such as shafts, bushings, bearings, sleeves, O-rings, gaskets, seals, wicks, etc. Only parts that meet or surpass OEM specifications are used to ensure dependable highest quality service and long pump life.
- Final test and leak check. The pump in fully assembled condition is checked for vacuum seal. Leak test to 1 x 10-9 Mbar l/s. Vibrations are analyzed and test data is digitally recorded.
Every pump and instrument is extensively tested for 48 hours. During our final tests, we monitor total pressure, temperature, vibration and noise level utilizing newest testing technologies and techniques specified by OEM. Upon request, we can provide our customers with a pump down graph. Call us for your free repair estimate at 1-973-249-0854.
