T1000 is an ultra compact new generation dry vacuum pump jointly developed by Toyota Industries Corp. and Applied Materials, Inc., which is designed for installation on semiconductor equipment in cleanroom
Toyota Dry Pumps T1800, T1200, T1000, T600, T100P are roots type vacuum pumps that rotate a pair of synchronized, timing gears, and incorporate a roots type booster pump. Bearings and gears on the high pressure side are lubricated by fluoric type oil. Ceramic balls are used in the bearings on the low pressure side, and those bearings are lubricated by fluoric type grease.
The Toyota T1000 Dry Pump and motor are equipped with an indirect cooling system by cooling water, which enables thermal control by automatic switching of internal valve.
The Toyota T 1000 Vacuum Pump has a N2 purge structure, and N2 is used for diluting various process gases and shaft seals.
Click Here for Toyota IPUP T1000 L Manual
Size(L*W*H) : |
590*600*300mm |
Ultimate Pressure Pa(Torr) : |
1.1 (0.007) |
Pumping Speed m3/h : |
600-950 |
Power Consumption kW : |
1.6 |
Inlet Flange |
ISO 100 Bolted |
Exhaust Flange |
KF 25 |
Sound Level dB(A): |
<58 |
Vibration G: |
0.1 |
Weight kg: |
104 |
Please note: Remote Controller is Not Included |
Click Here for Toyota IPUP T1000 L Manual
A & J Vacuum Services provides repair service for all types of High Vacuum equipment. We perform Turbomolecular Pump repair, Turbo Pump Repair, Dry Pump repair, Vacuum Pump repair, Mass Spectrometer repair, Rotary Vane Pump repair, Vacuum Booster repair, and Leak detector repair. Our highly trained technicians have years of experience and guarantee the highest quality service.
We operate at our own full service repair facility in Clifton, NJ. We have invested in state-of-the-art equipment including; complete line of decontamination, cleaning, drying, balancing, vibration analysis and software to minimize failures. Our in-house machine shop is capable of machining various components, prototypes and housing conversions as needed.
We support all major manufacturers including Pfeiffer Vacuum, Alcatel / Adixen, Edwards Vacuum, Varian, Oerlikon / Leybod Vacuum, Vacuubrand, and Agilent Technologies.
Repair Steps
Every pump and instrument is extensively tested for 48 hours. During our final tests, we monitor total pressure, temperature, vibration and noise level utilizing newest testing technologies and techniques specified by OEM. Upon request, we can provide our customers with a pump down graph. Call us for your free repair estimate at 1-973-249-0854.
T1000 is an ultra compact new generation dry vacuum pump jointly developed by Toyota Industries Corp. and Applied Materials, Inc., which is designed for installation on semiconductor equipment in cleanroom
Toyota Dry Pumps T1800, T1200, T1000, T600, T100P are roots type vacuum pumps that rotate a pair of synchronized, timing gears, and incorporate a roots type booster pump. Bearings and gears on the high pressure side are lubricated by fluoric type oil. Ceramic balls are used in the bearings on the low pressure side, and those bearings are lubricated by fluoric type grease.
The Toyota T1000 Dry Pump and motor are equipped with an indirect cooling system by cooling water, which enables thermal control by automatic switching of internal valve.
The Toyota T 1000 Vacuum Pump has a N2 purge structure, and N2 is used for diluting various process gases and shaft seals.
Click Here for Toyota IPUP T1000 L Manual
Size(L*W*H) : |
590*600*300mm |
Ultimate Pressure Pa(Torr) : |
1.1 (0.007) |
Pumping Speed m3/h : |
600-950 |
Power Consumption kW : |
1.6 |
Inlet Flange |
ISO 100 Bolted |
Exhaust Flange |
KF 25 |
Sound Level dB(A): |
<58 |
Vibration G: |
0.1 |
Weight kg: |
104 |
Please note: Remote Controller is Not Included |
Click Here for Toyota IPUP T1000 L Manual
A & J Vacuum Services provides repair service for all types of High Vacuum equipment. We perform Turbomolecular Pump repair, Turbo Pump Repair, Dry Pump repair, Vacuum Pump repair, Mass Spectrometer repair, Rotary Vane Pump repair, Vacuum Booster repair, and Leak detector repair. Our highly trained technicians have years of experience and guarantee the highest quality service.
We operate at our own full service repair facility in Clifton, NJ. We have invested in state-of-the-art equipment including; complete line of decontamination, cleaning, drying, balancing, vibration analysis and software to minimize failures. Our in-house machine shop is capable of machining various components, prototypes and housing conversions as needed.
We support all major manufacturers including Pfeiffer Vacuum, Alcatel / Adixen, Edwards Vacuum, Varian, Oerlikon / Leybod Vacuum, Vacuubrand, and Agilent Technologies.
Repair Steps
Every pump and instrument is extensively tested for 48 hours. During our final tests, we monitor total pressure, temperature, vibration and noise level utilizing newest testing technologies and techniques specified by OEM. Upon request, we can provide our customers with a pump down graph. Call us for your free repair estimate at 1-973-249-0854.